Abstract
The basic premise of the incoherent imaging model is that the image is the convolution of the incident probe intensity and an appropriate specimen object function. Frozen phonon calculations and multiple experimental defocus series of indium phosphide (100) indicate that annular dark-field (ADF) scanning transmission electron microscope (STEM) imaging follows the incoherent imaging model for crystalline specimens aligned along a zone axis. At the limit of resolution, the ADF STEM signal is very sensitive to incident probe shape, and precise values for the imaging parameters must be known in order to perform quantitative image analysis. The incoherent imaging-model accounts for the subtle effects of the imaging conditions and permits the determination of a specimen object function which is independent of the imaging parameters and therefore simpler to interpret in terms of the actual specimen structure. Identifying and minimizing image artifacts introduced by the imaging conditions is an essential step in quantitative ADF STEM imaging.
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