Abstract
This paper designs an AlGaN nanoarray model with different Al composition distributions, and studies the effects of geometric parameters on its optical response and quantum efficiency. COMSOL Multiphysics software was used to calculate and analyze the influence of the axis inclination on the light absorption efficiency and light field distribution of the nanostructures. Compared with vertical nanostructures, tilted structure arrays have better light absorption characteristics, and the photoelectric response of gradient Al composition AlGaN photocathode is more significant at the wavelength region of 200–300 nm. Simulation studies have found that the dense nanostructured array will reabsorb part of the emitted electrons, and the use of an auxiliary external electric field can effectively improve the collection efficiency of the photocathode. Finally, when the external electric field is 2.5 V/μm, the nanowire height is 800 nm and the incident angle is 10°, the GaN-Al0.365Ga0.635N layered nanostructure array can achieve an electrical response efficiency of 30.93%.
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