Abstract
Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive Ion Etching Process
Highlights
The inclination effects on the electrostatic tuning of the capacitive MEMS disk resonator array have been studied in this work
How the electrical stiffness produced by the electrostatic force tunes the resonance frequency has been analyzed by simplifying the disk resonator as a mechanical model
For a single disk resonator, considering the inclination effects caused by deep reactive-ion eching (DRIE), the changes in resonance frequency and electromechanical coupling strength have been given with several curves
Summary
Oscillators based on micro-electromechanical system (MEMS) resonators have recently become viable alternatives to traditional quartz versions owing to their small size, high quality. The design method of using coupled-array composite resonators that mechanically link individual disk resonators via half-wavelength coupling beams can be used.[14] Here, all resonators vibrate at precisely the same frequency, allowing their outputs to be combined to boost input and output currents, thereby decreasing the motional resistance and improving linearity by reducing the amplitude.[15] Reference 16 shows that larger mechanically coupled arrays can offer better stability against electrical-stiffness-based frequency instability. Nguyen[8] showed that, at 1 GHz, 50 Ω can be achieved using a mechanically coupled array of 243-mm-thick, 2.64-mm-radius, and 50,000-Q poly-silicon disks, each with a dc bias voltage of 10 V and an electrode-to-resonator gap spacing of 30 nm. We introduced a tuning disk array to change the original resonator frequency and obtained the optimal tuning voltage and size of the tuning disk array
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