Abstract

We have tried the growth of InAs dots on Si surfaces terminated with hydrogen atoms. It has been confirmed with cross-section transmission electron microscopy (XTEM) and field emission scanning electron microscopy (FESEM) that high quality InAs nanocrystals can be grown with a high density on Si (100) surfaces terminated with hydrogen atoms. The growth of InAs nanocrystals is initiated with formation of In islands followed by diffusion of As atoms into the In dots. The band discontinuity of the InAs/Si interface has been evaluated using the results of synchrotron radiation photoelectron spectroscopy (SRPES). The offsets for valence band and conduction band are estimated to be 0.31 eV and 0.44 eV, respectively. This result indicates that both holes and electrons can be well confined into InAs nanocrystals.

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