Abstract
The article presents the research results of gas-sensing properties of mixed oxide In2O3–Ga2O3 thin films with different composition, obtained by pulsed laser deposition from pressed powder targets. These properties are manifested in the case of ammonia in the temperature dependencies of gas-induced resistance response and in the dynamics of the gas response in the temperature range 300–560°C. The paper discusses these dependencies for films with 50%In2O3–50%Ga2O3 composition to ethanol, acetone, ammonia or propane-butane. Authors attribute the specific behavior of ammonia to its catalytic oxidation on the active sites of the surface of transition metal oxides to form nitrous oxide (N2O), which acts as strong oxidizer. The presented results can be used to develop innovative gas sensors based on oxide In2O3–Ga2O3 films with high selectivity to ammonia. The article proposes optimal temperatures for two modes of operation for those sensors: a mode with multiple operating temperatures and a dynamic mode with a stepwise delivery of the test gas.The article presents the research results of gas-sensing properties of mixed oxide In2O3–Ga2O3 thin films with different composition, obtained by pulsed laser deposition from pressed powder targets. These properties are manifested in the case of ammonia in the temperature dependencies of gas-induced resistance response and in the dynamics of the gas response in the temperature range 300–560°C. The paper discusses these dependencies for films with 50%In2O3–50%Ga2O3 composition to ethanol, acetone, ammonia or propane-butane. Authors attribute the specific behavior of ammonia to its catalytic oxidation on the active sites of the surface of transition metal oxides to form nitrous oxide (N2O), which acts as strong oxidizer. The presented results can be used to develop innovative gas sensors based on oxide In2O3–Ga2O3 films with high selectivity to ammonia. The article proposes optimal temperatures for two modes of operation for those sensors: a mode with multiple operating temperatures and a dynamic mode with ...
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