Abstract
We demonstrate a novel microelectromechanical systems (MEMS) based dual-axes confocal (DAC) microscope in a 10-mm diameter handheld package. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional (2-D) MEMS scanner that is actuated by self-aligned vertical comb actuators. The maximum DC optical scan angles are ±4.25° on the inner axis and ±1.5° on the outer axis, and the corresponding resonance frequencies are 3.4 kHz and 1.2 kHz. The maximum imaging rate is 5 frames/second. The miniature DAC microscope operating at 785-nm-wavelength achieves full-width-half-maximum (FWHM) transverse and axial resolutions of 4.2 ¿m and 7 ¿m, respectively.
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