In-situ variable reflectance spectra model of two-dimensional material prepared by CVD

Abstract

Here we introduce the spectral measurement model of online reflectance spectra aimed at the variable temperature environment. The model combines the traditional differential reflectance spectroscopy (DRS) model with the temperature error compensation method. The blank experiments and molybdenum disulfide (MoS2) growth experiment prepared by chemical vapor deposition (CVD) were monitored in situ by using the new DRS model proposed in this work. The characteristic peaks of MoS2 at 1.82 eV and 1.99 eV were successfully discovered in the spectra processed by the temperature error compensation method. This observation reveals that MoS2 thin films have grown. The morphology and Raman properties of MoS2 domains were off-line characterized using optical microscopy and Raman spectroscopy. The experimental results indicate that the spectral model and the temperature error compensation method can contribute to the real-time growth characterization of two-dimensional material (2D). It is of great significance for the preparation and application of 2D materials.