Abstract
We have studied the characteristic behaviour of dust particle formation in the capacitively coupled standard GEC cell using Ar/CH 4 methane and Ar/C 2H 2 mixtures. Laser light scattering and absorption by dust particles, plasma emission, spectrum analysis for the change of plasma impedance by the presence of dust particles, atomic spectral emission by argon atoms, and mass spectroscopic measurements are performed in-situ. Using the 7th harmonic signal as an external control parameter, we have successfully deposited two-dimensional periodic structures of ‘dust dots’.
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