Abstract
Triboelectric nanogenerators (TENG) can convert mechanical energy into electricity and exhibit unique advantages in the field of low-frequency and discrete energy harvesting. However, the interfacial state and stability between the triboelectric layer and electrode layer influence the output and applications of TENG. Herein, an in situ sputtering Ag process for fabricating induction electrodes is proposed to match with TENG. The sputtering Ag process is optimized by a variety of parameters, such as sputtering power, single-cycle time, number of cycles, cycle interval, and vacuum degree. In addition, the chemical state of Ag as a function of air placement is investigated, showing the sputtered Ag has excellent conductivity and stability. Moreover, four kinds of polymers are selected for fabricating TENGs based on the sputtered Ag induction electrodes, i.e., nylon 66, polyimide (PI), fluorinated ethylene propylene (FEP), and polydimethylsiloxane (PDMS), which shows great applicability. Considering the demand of flexible power suppliers, the sputtered Ag is integrated with a PDMS substrate, and shows good adhesion, flexibility, and ductility after severe deformation of the PDMS. Finally, the developed induction electrode processing technology is used in flexible TENG and shows great prospects in self-powered electronics for practical applications.
Highlights
We report an in situ sputtering Ag process for fabricating induction electrodes used in Triboelectric nanogenerators (TENG)
The developed induction electrode processing technology is used in flexible TENG and shows great prospects in self-powered electronics for practical applications
We propose an in situ sputtering Ag process for fabricating induction electrodes used in TENG
Summary
To reduce the reliance on traditional fossil energy and realize the carbon-neutral environmental energy vision, it is urgent to develop new green and sustainable energy technologies all over the world [1–5]. Energy sources such as solar, wind, ocean, and biomass energy have been developed and used [6–12]. In addition to these large-scale energy sources, our living environment is scattered with a large number of irregular, low-frequency, discrete energy sources, such as raindrop, water-wave, and tiny mechanical energy [13–18]. These energy sources are small; the number is large, and if used effectively, they will make an important contribution to energy utilization
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