Abstract
Single cavity Fabry-Perot filters are one of the most popular designs for the production of narrow bandpass filters. The usual deposition strategy to create such filters based on optical monitoring at the filter central wavelength is well-known and has proven its strength over decades. We review in this paper the possible optical methods to monitor such a filter during production and analyze their strengths and weaknesses. Then, we discuss a new monitoring procedure, mixing different methods, to minimize the production errors of this filter while maintaining a precise filter centering. This strategy is applied on different bandpass filter designs.
Highlights
1.1 Thin film Fabry-Perot filtersThin film filters offer a wide range of possible optical functions with the advantage that they can be integrated into any optical system [1]
Even if optical thin film technology made great improvement over the last decades, the accurate manufacturing of narrow band pass filters still remains of first importance
Turning Point Monitoring remains till today the most common strategy for monitoring quaterwave based structures
Summary
Thin film filters offer a wide range of possible optical functions with the advantage that they can be integrated into any optical system [1]. Fabry-Perot structures present a minimum of level of transmittance directly linked to the mirror reflection efficiency The width of this rejection band is roughly equal to the width of the reflection band of the mirrors (typically a few hundreds of nanometers) and depends on the ratio of the high and low refractive index materials. If a wider spectral band is required, for example covering the whole sensitivity range of a Si sensor for visible filters [10], Fabry-Perot structures are combined with additional mirrors or edge filters that allow increasing the rejection band to several hundreds of nanometers These blocking multilayer structures are generally coherently combined with the Fabry-Perot filters within one single structure; the final performances over a wide spectral range are highly dependent on the initial performances and especially on errors on each layer of the Fabry-Perot filter that is manufactured
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