Abstract
A study has been made of Raman scattering from Ag- and W-ions implanted polyimide films by using 514.5 nm laser irradiation. The Raman spectra by laser irradiation of 25 W/cm 2 show that the mixture of graphite and amorphous carbon is generated in Ag- or W-ions implanted layers. The use of laser irradiation of 220 W/cm 2 causes the Raman scattering and fluorescence of Ag-implanted specimen to change. To the contrary, the repetition of laser irradiation of 220 W/cm 2 to W-implanted layers has a little influence on the Raman scattering and hardly affects the fluorescence. It is concluded that the carbon structure generated by ion implantation and annealed by the following laser irradiation is dependent on the implanted elements.
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