Abstract

A new microelectromechanical system (MEMS)-based tensile testing stage (with integrated actuator, direct load sensing beam, and electrodes for controlled assembly of an individual nanostructure) was developed and used for in situ tensile loading of a templated carbon nanotube (T-CNT) inside a scanning electron microscope (SEM). Specifically, an increasing tensile load was applied to the T-CNT by actuating the device and high-resolution scanning electron microscopy images were acquired at different loads. The load (from the bending of the direct force-sensing beam), the elongation of the specimen during loading, and the specimen geometry were all obtained from analysis of SEM images. The stress versus strain curve and Young’s modulus were thus obtained. A model is presented for the tensile loading experiment, and the fit value of Young’s modulus from this model is compared to values obtained by an independent method. The results of this experiment on a T-CNT suggest the use of this device for loading other nanostructures and also for designing other MEMS-based systems, such as a compressive testing stage.

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