In-situ Measurement by Using a Measurement-Fused Machining System

Abstract

A calibration method is proposed to compensate the measurement error in in-situ measurement using non-contact probes. In the measurement with a measurement-fused machining system, a displacement for calibration is measured with the probes for reference and profile measurement to calibrate the profile probe according to the reference probe. In this paper, the proposed method is used to compensate the measurement error of a triangular surveying type laser displacement sensor caused by tilting of the measuring surface. The experimental result shows that the error is decreased from ±0.9 μm to ±0.5 μm with the method.