Abstract
Infrared emission spectroscopy (IRES) was used for studying in situ gas-surface interactions and adsorbed species on Ga 2O 3 at elevated temperatures used for gas sensors. Regarding the permanent presence of humidity in most gas sensor applications, the interaction of H 2O with the sensor surface was observed under working conditions in order to emphasize the benefits of IRES for the understanding of gas sensing mechanisms. The coadsorption of water and H 2,C 2H 4, acetone and ethanol was investigated to point out the role of humidity in the sensitive reactions to organic gases. Screen printed Ga 2O 3 films were studied in the temperature range from 250°C up to 650°C. These results were correlated with simultaneous conductivity measurements. The evident influence of the addition of water on the surface chemistry of Ga 2O 3 during the adsorption of hydrogen-containing gases is confirmed by this work.
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