In-Situ HREM of A Surface Reconstruction of Si Surface With Molten Al at High Temperatures

Abstract

IntroductionThe morphology of Si surface has much effect on physical and chemical properties of the surface. It is well known that the structure of Si surface can be modified by deposition of metals, and extensive studies have been carried out on the modified surface structures of Si. These studies were carried out on clean surfaces of Si in an ultra-high vacuum (UHV). However recently, it has been shown by Kamino et al.[l] that molten Au atoms remove a surface amorphous layer on the Si surface, making the surface clean even in a non ultra-high vacuum. The present study is an extension to the previous one (Kamino et al.) and Si surfaces modified by-molten Al atoms in a conventional vacuum were observed by means of TEM.ExperimentalThe specimen used in this study was a mixture of pure Al particles and Si particles, the latter being prepared by crushing a Si single crystal into pieces.