Abstract

Thin films of antimony-doped SnO 2 coated on stainless steel were fabricated by metallo-organic decomposition (MOD) techniques. A novel method for thermal fabrication of SnO 2 type films utilizing in situ high-temperature x-ray diffraction (HTXRD) found crystallization onset occurred between 400 and 500°C. Processing at fixed temperatures of 500, 700, and 900°C provided a high degree of crystallization after approximately 2 hr. The resulting crystallites after 6 hr of heating ranged in size from 36 Å at 500°C to 205 Å at 900°C. It has been observed that prolonged thermal processing of these samples leads to oxidation of the stainless steel substrate.

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