Abstract
Abstract High quality YBaCuO superconducting thin films were fabricated in situ on ZrO 2 substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriented and exhibited a zero resistance at 88 K and critical current density J c (77 K) of 10 6 A cm −2 . A large diameter powder target was advantageous for adjusting the film composition and improving film uniformity. We demonstrate that by using ion beam sputtering, in situ YBaCuO films, which are equal to or better in film quality than those produced with laser ablation and magnetron sputtering, can be deposited.
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