Abstract
Abstract Epitaxial, (001) oriented Y 1 Ba 2 Cu 3 O 7-x thin films were grown on MgO(100) by molecular beam epitaxy at 650°C. The activated oxygen species were produced by a remote microwave-excited discharge in a flow tube. Remarkable improvements of superconducting properties were demonstrated due to enhancements of the flow speed of O 2 stream. The as-prepared films 500A thick show reproducibly R=0 transitions at 89K, and a ϱ(100K) of 70 μΩ-cm. Ultrathin films 90A thick still exhibit metallic-like resistivity, and a T c (R=0) of 70K.
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