Abstract
SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, consists of a dedicated X-ray lithography beamline on a bend magnet port, and process support laboratories in a cleanroom environment. The beamline comprises a double mirror system with flat, chromium-coated silicon mirrors operated at varying grazing angles of incidence for spectral adjustment by high energy cut-off. We present in this paper, the in situ diagnostic components inside the vacuum vessel upstream and downstream of the mirrors that allow for monitoring the incident beam and the reflected beam after first, second, and both mirrors. Four fly wire systems are used for beam position monitoring and intensity measurements. Additionally, four detector plates mounted on and moving with the mirror bodies are used to determine the position of the mirror surfaces with respect to the beam. First experimental results verify the capabilities of the system by showing good agreement between measured and calculated data.
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