Abstract
The use of microfabricated field emission cathodes in applications of technological importance has been hindered by difficulties in obtaining acceptable emission characteristics in the vacuum environment of the device. We have investigated in situ surface cleaning and annealing using high pulsed electron emission. Extraction of high current densities provides a reliable means to shape and clean microfabricated field emitter tips, thereby enhancing their temporal stability and emission spatial uniformity.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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