Abstract

Strain relaxation mechanisms occurring during self-induced growth of nitride nanowires areinvestigated by in situ reflection high-energy electron diffraction and ex situ high-resolutiontransmission electron microscopy. Epitaxial GaN nanowires nucleate on an AlN buffer layerunder highly nitrogen-rich conditions via the initial formation of coherently strainedthree-dimensional islands according to the Volmer–Weber growth mechanism. Theepitaxial strain relief in these islands occurs by two different processes. Initially,strain is elastically relieved via several shape transitions. Subsequently, plasticrelaxation takes place through the formation of a misfit dislocation at the GaN/AlNinterface. At the same time, a final shape transition to fully relaxed nanowires occurs.

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