Abstract
We calibrated the wavelength dependence of the relative sensitivity of an optical emission spectroscopy system, which was composed of a grating monochromator and a secondary electron multiplier tube, in a vacuum ultraviolet wavelength range on the basis of the calibrated sensitivity of a silicon photodiode. The experimental result shows a significant wavelength dependence of the sensitivity in a wavelength range between 80 and 160 nm. The calibration curve was compared with the absolute sensitivity evaluated using a branching ratio technique at the Lyman and Balmer lines of atomic hydrogen.
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