In-laboratory sensitivity calibration of an optical emission spectroscopy system in vacuum ultraviolet wavelength range

Abstract

We calibrated the wavelength dependence of the relative sensitivity of an optical emission spectroscopy system, which was composed of a grating monochromator and a secondary electron multiplier tube, in a vacuum ultraviolet wavelength range on the basis of the calibrated sensitivity of a silicon photodiode. The experimental result shows a significant wavelength dependence of the sensitivity in a wavelength range between 80 and 160 nm. The calibration curve was compared with the absolute sensitivity evaluated using a branching ratio technique at the Lyman and Balmer lines of atomic hydrogen.