In induced reconstructions of Si(1 1 1) as superlattice matched epitaxial templates for InN growth

Abstract

Indium induced surface reconstructions of Si(111)-7×7 are used as templates to grow high quality InN. We grow InN on Si(111)-7×7, Si(111)-4×1-In and Si(111)-1×1-In reconstructed surfaces and study the quality of the films formed using complementary characterization tools. InN grown on Si(111)-1×1-In reconstruction shows superior film quality with lowest band-edge emission having a narrow full width at half maximum, intense and narrow 0002 X-ray diffraction, low surface roughness and carrier concentration an order lower than other samples. We attribute the high quality of the film formed at 300°C to the integral matching of InN and super lattice dimensions, we also study the reasons for the band gap variation of InN in the literature. Present study demonstrates the proposed Superlattice Matched Epitaxy can be a general approach to grow good quality InN at much lower growth temperature on compatible In induced reconstructions of the Si surface.