Abstract
Laser-induced fluorescence spectroscopy can provide a highly sensitive and selective means of atomic and ionic impurity detection. Because the photodetector can be physically isolated from the laser-excited region, these techniques can be applied to monitoring in hostile environments. The basic concepts behind fluorescence detection are reviewed. Saturated optical excitation is shown to maximize impurity atom emission yield while mitigating effects of laser intensity fluctuations upon absolute density calibration. A comparison of monitoring in high- and low-pressure monitoring environments is given. Methods to improve detection sensitivity by luminescence background suppression are presented.
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