Abstract
A 300 nm thin film of ZnO has been deposited by magnetron sputtering on hydrothermally grown ZnO and heat treated at temperatures ranging from 500 to 1200 °C. Secondary ion mass spectrometry has been carried out to obtain impurity versus depth profiles around the homojunction. Migration of Al and Mg is observed above 1000 °C, while lighter elements such as H and Li diffuse at lower temperatures. The results show that several typical impurities are mobile in ZnO during thermal treatments, although the diffusivity for most impurities is too low for an effective out-diffusion in bulk ZnO. The depth distributions of Li clearly demonstrate that Li is mobile at temperatures below 600 °C, in contrast to the observation of an overall reduction in Li above 1000 °C in hydrothermally grown ZnO.
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