Abstract
Failure of vacuum valves on the JEOL 2000FX scanning transmission electron microscope (STEM) fitted with a sputter ion pump (SIP) was caused by inadequate logic control and feedback from the SIP controller to the vacuum controller. Two low-cost circuit modifications to the SIP controller solved this problem.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
