Improving transmittance of long-wave infrared guided-mode resonant filters

Abstract

The long-wave infrared (LWIR) spectral region spanning from 8 to 12 μm is useful for many scientific and industrial applications. Many of these applications require use of either a bandpass or a bandstop filter that can be realized by the guided-mode resonance (GMR) effect with subwavelength periodic features in layered dielectric materials transparent in the LWIR. The GMR filters operating in the LWIR region are fabricated by depositing an amorphous germanium (Ge) film to form a zero-contrast (ZC) waveguide-grating (WGG) on a polished zinc selenide (ZnSe) substrate. In general, the backside of a ZnSe substrate with refractive index 2.41 is uncoated causing a 17% Fresnel-reflection loss in the light transmitted through the filter due to a large impedance mismatch at the ZnSe/air interface. Because we use such filters in the LWIR laser experiments for notch filtering, to improve the filter transmittance we used ZnSe substrates coated on one-side with broadband antireflection coating (ARC) covering the 7 to 12 μm spectral range to fabricate GMRFs with one-dimensional (1D) Ge ZC WGG. We employed high-spatial resolution e-beam lithography and reactive-ion etching nanofabrication techniques to achieve high-performance large-area (12 × 12 mm2) 1D notch filters with subwavelength periods. We characterized polarization dependent spectral performance of the prototype filters with both coherent and incoherent incident light using a tunable quantum cascade laser system that spans the 7 to 12 μm region, and a Fourier transform infrared spectrometer with collimated incident beam to achieve close to 15% improvement in the peak transmittance as well as significant reduction in coherent noise compared to our earlier results with GMRFs without ARC. Here, we present the filter design simulation and measurement results.