Abstract
Synthetic quartz materials with high ultraviolet transmittance are widely used in lenses and other optical devices. However, the relatively insufficient transmittance limits the application. In this paper, method of Defect Compensation is proposed to reduce the content of ODC, E'center and NBOHC and synthetic quartz glass with UV high transmittance was prepared successfully. The glass has high transmittance with internal transmittance of 99.9%@193nm, low stress birefringence with 0.9nm/cm @632.8nm and good optical homogeneity with 0.78ppm @ 632.8nm.
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