Improving the tribological properties of DLC (Fullerene-like) films grown by ECR-CVD with metal nanoparticles incorporation

Abstract

ABSTRACTThin Me-DLC films with different metal contents have been deposited by ECR-CVD (Electron Cyclotron Resonance Chemical Vapour Deposition). Before the growth process, metal nanoparticles were scattered over the substrate surface by dipping it into a dispersion previously sonicated. The concentration of the dispersion (150, 300, 500 and 5000 ppm) controls the metal content into the carbon coating. The morphology of the deposited samples was analysed by SEM (Scanning Electron Microscopy). The metal content in the carbon films has been evaluated by SIMS (Secondary Ion Mass Spectroscopy). The incorporation of low amounts of metal nanoparticles into the hard carbon coating produces an outstanding improvement in the durability of the layer, as detected by pin-on-disc tests. For an optimum chromium content of 300 ppm of nanoparticles in the dispersion, the grown layer exhibits a noteworthy higher wear resistance respect to that of the DLC reference film. More precisely, in this case, the Cr-DLC coating undergoes ten times longer wear process than the reference DLC coating. However, it is important to indicate that in samples grown using more concentrated dispersions (> 300 ppm), a rapid deterioration of the coating is produced and short lifetimes have been detected, attributed to the large contribution of metal to the transfer layer.