Abstract
We have examined the performance of a modified beta-ray spectrometer using a pulse shape analyzer/timing single channel analyzer and related electronics, thereby preserving the low energy electron tail in measurement of the scattered electron spectra from an n-type Si wafer target. Comparison of measurements with the scattering spectra calculated by the Monte Carlo program EGS4 indicates good agreement across a significant part of the spectrum, an exception being for the energy region 30–100 keV. Re-evaluation of existing scattering cross-sections would be useful, as would possible geometrical effects of the scattering arrangement used herein. Present efforts seek to contribute to the evaluation of electron scattering cross-sections and improvement in theoretical models.
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