Abstract
Integral Resonant Control (IRC) is a simple and robust control scheme for vibration damping. Combined with an integral tracking controller, the IRC has been shown to improve the performance of a wide range of nanopositioners. However, the overall improvement in positioning performance is limited by the pole induced by the IRC. Through selective zero placement, the induced pole can be placed near origin. A structured PI tracking controller, where the PI gains are selected to place a zero at a specific location, is used to cancel the pole. This effectively reduces the order of the system by one. For this system, controller gains are derived analytically in order to maximize tracking bandwidth. Simulation results for one axis of a nanopositioner are provided for both standard and modified IRC schemes. Compared to the standard IRC scheme, the modified IRC scheme is found to provide a 55% increase in the ±1 dB bandwidth and a reduction of both maximum and rms tracking errors.
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