Abstract
Electron transport layer (ETL) plays an important role in the development of high performance perovskite solar cells (PSC). Here, we first compared the optical and surface morphology characteristics of titanium dioxide (TiO<sub>2</sub>) thin films prepared by electron beam evaporation (EB) and hydrothermal (HT) method, as well as the device performance of perovskite solar cells, and then studied the effect of electron beam evaporation TiO<sub>2</sub> film thickness on the performance of perovskite solar cells. It was found that the morphology of TiO<sub>2</sub> ETL prepared by electron beam evaporation was more uniform and compact, and the surface root mean square roughness was lower than that of hydrothermal method, and the quality of the film was better. And the average transmittance of TiO<sub>2</sub> ETL prepared by electron beam evaporation was 94.67%. Compared with hydrothermal method, the PCE of TiO<sub>2</sub>-based PSC devices based on electron beam evaporation was increased by 60%. The thickness of TiO<sub>2</sub> ETL was adjusted by electron beam evaporation, and a good surface morphology of the film was obtained. When the thickness was 75 nm, the ETL of the prepared PSC showed the best device performance, and the PCE reached 9.00%, showing excellent performance.
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