Improving material removal determinacy based on the compensation of tool influence function

Abstract

In the process of computer-controlled optical surfacing (CCOS), the key of correcting the surface error of optical components is to ensure the consistency between the simulated tool influence function and the actual tool influence function (TIF). The existing removal model usually adopts the fixed-point TIF to remove the material with the planning path and velocity, and it considers that the polishing process is linear and time invariant. However, in the actual polishing process, the TIF is a function related to the feed speed. In this paper, the relationship between the actual TIF and the feed speed (i.e. the compensation relationship between static removal and dynamic removal) is determined by experimental method. Then, the existing removal model is modified based on the compensation relationship, to improve the conformity between simulated and actual processing. Finally, the surface error modification correction test are carried out. The results show that the fitting degree of the simulated surface and the experimental surface is better than 88%, and the surface correction accuracy can be better than 1/10 λ (Λ=632.8nm).