Improving contact performance of graphene on p-type GaN thin films with V-pits microstructures

Abstract

This study presents the electrical properties of graphene that directly is contact on two types of p-type GaN thin films. The diameter of several hundred nanometer V-pits were formed on the p-GaN thin films by adjusting the NH3 flow rate during the metal organic chemical vapor deposition epitaxial process. The single-layer graphene with a high transmittance of 97% in the visible range was transferred on p-GaN thin films to form an Ohmic contact. The V-pits provide more carrier transport paths that promote the carrier tunneling into p-GaN thin films, resulting in a better Ohmic contact performance. In addition, the increased current value was attributed to the presence of V-pits on the p-GaN thin films.