Abstract
Ultrasonic motors are nonlinear in input–output characteristics, which causes problems for precise control. To obtain good controllability and realize low-cost fabrication, we proposed an ultrasonic linear motor using a multilayered transducer with independent electrode sets for the first longitudinal mode and the second bending mode. We can change the shape of the vibration locus at the friction head arbitrarily by independently controlling the amplitude and phase of each vibration component. Controllability in the proposed motor was investigated by changing the shape of the vibration locus. In the proposed motor, the nonlinear part of the input–output characteristics is suppressed to 1/20 of that in conventional ultrasonic motors. As a result, a good positioning resolution of 20 nm and a low-speed drive of 0.1 mm/s were obtained with a simple closed-loop control system.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
