Abstract

A dedicated apparatus for polarization measurements in a soft x-ray region, which was previously developed and installed in a soft x-ray beamline (BL-11) at SR Center, Ritsumeikan University, is thoroughly improved. It allows us to adjust and set the angle of incidence and the height position of a polarization optical component more accurately even in vacuum. Using two Mo/Si multilayer mirrors fabricated as polarizers, the linear polarization degree of a 13.9-nm radiation from the BL-11 beamline is evaluated and determined to be 91%, as well as the polarization performance of the polarizers used.

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