Abstract
An improved source lens structure for a microcolumn including a subsidiary control electrode is designed, and its current characteristics are analyzed. The effect of the control electrode, which was inserted between the extractor and the anode, shows improved characteristics, such as a higher probe beam current, compared to a microcolumn with a conventional source lens structures. The field enhancement factor extracted through current measurement and simulation was 3.95, and this value was applied to all column structures investigated in this work. The column with the newlydesigned source lens structure showed a drastic increase in the probe beam current according to the driving voltage applied to the control electrode. The design parameters of the newly-developed source lens structure are provided with a simulation analysis.
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