Abstract
Mass spectrometry is an essential part of ion implantation. Therefore, in order to guarantee beam purity avoiding contamination of the implanted samples, a system was developed for the high current implanter at the Laboratory of Accelerators and Radiation Technologies (LATR) at the Instituto Superior Técnico. The system presented and discussed in this paper was developed using a LabVIEW code and uses a PC to control and display the mass spectrum. It also permits to save all data acquired for posterior analysis. In order to show some capabilities of this system, some experimental results are presented.
Highlights
The ion implanter installed at Laboratory of Accelerators and Radiation Technologies (LATR) at the Nuclear and Technological Campus of Instituto Superior Técnico (IST) is dedicated to materials research which makes isotope selection an important requirement
The high current ion implanter installed at LATR-IST, represented in Figure 1, is the model 1090 of Danfysik [6] [7]
The control system presented in this paper was developed to improve the mass spectrometry of the ion implanter used by LATR-IST for scientific research
Summary
The ion implanter installed at Laboratory of Accelerators and Radiation Technologies (LATR) at the Nuclear and Technological Campus of Instituto Superior Técnico (IST) is dedicated to materials research which makes isotope selection an important requirement. Being the selectivity of the implanted chemical species one of the most relevant advantages of ion implantation, the mass spectrometry is essential in this process in order to guarantee beam purity avoiding the contamination of the implanted samples [1]-[5]. The system developed and presented in this paper permits to the user to control and analyze the mass spectrometry through a PC application, optimizing the entire mass spectrometry process. This system allows exporting all data acquired for further analysis. (2016) Improvement of the Mass Spectrometry Process on an Ion Implantation.
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