Improvement of the Conformational Stability of 150 mm 4H SiC Wafers

Abstract

A method for mitigating loss of conformational stability in 150 mm n-type 4H SiC wafers was investigated. Modifications to the physical vapor transport (PVT) process used to grow the parent bulk crystals, combined with post-growth thermal treatment, were examined as means of reducing the internal stresses hypothesized to promote instability. The magnitude of the stresses was analyzed by mechanically thinning sets of wafers produced from each process to determine the critical thickness of stability loss. The average critical thickness was found to be reduced by 13% via growth cell modification, at a reduced level of thermal treatment relative to a control process, with all wafers becoming unstable greater than 30 μm below the minimum recorded production thickness. Assessment of the spatial uniformity of dislocations indicated that lower conformational stability corresponded to elevated densities of basal plane dislocations (BPDs) and threading edge dislocations (TEDs) at the wafer edge relative to the center.