Abstract
ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on interdigital transducer/Al2O3/glass substrates. Alumina films were deposited on glass substrates by electron beam evaporation. The crystalline structure and surface roughness of the films were investigated by X-ray diffraction and atomic force microscopy, respectively. The phase velocity and coupling coefficient of surface acoustic wave (SAW) device apparently increased when we increased the thickness of the alumina films. In addition, an excellent temperature coefficient of frequency of the SAW device was obtained by increasing the thickness of the alumina films. This experimental result is beneficial for enhancing the performance of ZnO thin-film SAW devices on inexpensive glass substrates.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
