Abstract
Galfenol Fe83Ga17 films are sputtered on Si wafers without, and with Ti or Ti/Cu metallic seedlayers in order to obtain a magnetoelastic layer which is sensitive to bendingdeformations of the compound structure. The layer thicknesses range from 100 nm to 5 µm. Layer morphology, texture, and the Villari effect are examined. Thetexture of the Galfenol films is strongly influenced by the seed layer. Nolow-index texture components are found for films directly deposited on Si andSiO2. On Ti, a (111) texture is formed on layers with more than 1000 nm thickness.A favorable (110) fiber texture is formed on Ti/Cu. Deforming the bimorphs (Si + layer system) by 0.012%, the Villari effect is detected due to the change in relativepermeability. The maximum change occurs for Galfenol films with a thickness of 1 µm on a Ti/Cu buffer layer. The films open a route to the incorporation of magnetoelastic filmsinto integrated magnetoelastic sensor devices.
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