Abstract
In this paper, we report the structural and electronic properties of TiCxNy films prepared by laser treatment under controlled gas atmosphere. X-ray diffraction shows the formation of TiCxNy along with the solid solutions of Ti(CN). The TiCxNy phases have been formed and are stable up to 650 °C. Subsequent laser irradiation at different laser energy densities in Ar-atmosphere modifies the microstructure and becomes oxidation resistant. Due to the formation of nano-crystalline TiCxNy, the affinity of Ti toward oxygen has been reduced remarkably after the Ar-treatments. Surface structure analysis by valence band spectroscopy reveals that the hybridization between Ti 3d and C 2p is increasing after the subsequent Ar-treatment at the cost of Ti 3d and N 2p hybridization.
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