Abstract
The multilayers composed of soft magnetic Ni/sub 79/Fe/sub 21/ layers and very thin paramagnetic Co/sub 67/Cr/sub 33/ layers were deposited using the facing targets sputtering (FTS) apparatus. When the external field H/sub ext/ of 100 Oe transverse to the direction of the plasma confining field H/sub p/ of about 20 Oe in the FTS apparatus was applied during layer deposition, the soft magnetic characteristics for the [Ni/sub 79/Fe/sub 21//Co/sub 67/Cr/sub 33/]/sub 2/ multilayers were improved. Furthermore, the relative permeability /spl mu//sub r/ of the multilayers was extremely and isotropically increased especially when the multilayers were deposited at extremely low Ar pressure P/sub Ar/ of 0.4 mTorr.
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