Improvement of Micro Linear Pump by Development of Micro Check Valves Through Micro Rubber Fabrication

Abstract

Research and development of micro-fluidic systems, such as μ-TAS (Micro-Total Analysis Systems) and micro reactor system, has recently become active in the fields of chemical engineering and biotechnology. Micro pumps are an essential element in the realizing of micro-fluidic systems. Therefore, in this research, a micro linear pump has been developed as a micro pump incorporated into micro-fluidic systems. The full length and diameter of the micro linear pump are 32.5 mm and 6 mm, respectively. The performances of micro pump depend largely on micro check valve. In this report, then, micro check valves having steric microstructure were developed through micro rubber fabrication for improving the micro linear pump. The micro rubber fabrication is a process integrated the finite element method (FEM) analysis, the precise die using a fine NC milling machine, the silicone rubber molding and the excimer laser junction. Thus far, most kind of micro check valves have planar structure. Having steric microstructure, however, the developed micro check valves have higher performances than conventional flat type micro check valves and work as check valve without the structure in the surrounding. This paper details the structure and performances of the developed micro check valves, as well as application test to the micro linear pump.