Abstract
A wide-angle laser-assisted three-dimensional atom probe (3DAP) was developed, with a wide angle (0.75 sr) and short flight distance (110 mm) adopted to enlarge the analysis area of the tip. However, the short flight distance of ions resulted in the degradation of mass resolution. Therefore, flight path compensation was examined to improve the mass resolution in the 3DAP with a flight distance of 110 mm. With geometric compensation based on a simple concentric sphere model, the detected ions could be identified. By the compensation of the flight path for a small inclination on the microchannel plate (MCP) in the direction normal to the tip axis, the isotopes of detected ions were identified and high mass resolution was attained for a very short flight distance. [DOI: 10.1380/ejssnt.2009.35]
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
