Abstract

Effects of magnetic material, coating thickness, and tip radius on the magnetic force microscope (MFM) spatial resolution and the switching field have been investigated. MFM tips are prepared by coating soft and hard magnetic materials on non-magnetic Si-base tips. MFM spatial resolutions better than 8 nm are obtained by optimizing the coating layer thickness at around 20 nm on the Si tips with top radius of 3 – 5 nm. The switching field can be increased greater than 1 kOe by coating a high-Ku magnetic material and by increasing the coating thickness. The tips are successfully applied to the observations of magnetic thin films which include magnetization structures less than 20 nm in length.

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