Abstract
We present a study of the improvement in interface roughness of platinum/carbon multilayers for X-ray mirrors. The X-ray reflectivity of multilayers strongly depends on interface quality. In an effort to reduce the interface roughness caused by crystallization during deposition, carbon doping of platinum was proposed, and its effectiveness was evaluated. We compared 45-nm-thick single-layer platinum to carbon-doped platinum films. The films were deposited on a silicon (100) substrate by dc magnetron sputtering deposition. The surface roughness and X-ray diffraction spectrum of each film were measured by atomic force microscopy and X-ray diffraction, respectively. We concluded that the increase in carbon concentration suppresses the crystallization of platinum and causes the surface roughness to decrease.
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