Improvement of gold electrode conductivity after cofiring with CaO–B2O3–SiO2 green tapes for LTCC application

Abstract

The cofiring process of Au paste containing various amount of glass additive with different properties and CaO–B2O3–SiO2 (CBS) green tapes was investigated. The initial shrinkage temperature of Au paste was strongly associated with the softening point and the content of glass additive. The swell of sample and its mechanism during cofiring process was reported. The sheet resistivity of Au electrode was greatly depended on the content of CBS glass additive. When the content of CBS glass additive with the softening point of 704 °C was 3 wt %, the Au electrode exhibited the highest conductivity with the sheet resistivity of 2.4 mΩ/sq. The results obtained in this paper revealed the relationship between the glass additive and cofiring defects of Au electrode in the metal/ceramic multilayer structure, which gave an avenue to manufacture Low temperature co-fired ceramics (LTCC) modules with good quality.