Abstract
Ferrite thin film magnetic core integrated radio frequency inductors (RFIs) were investigated in order to realize RFIs with a smaller size, higher driving frequency, and higher quality factor (Q). The ferrite thin films were fabricated by low-temperature spin-spray deposition assuming adaptation to the photolithography process for inductor fabrication with two different compositions: Ni0.16Zn0.20Fe2.64O4+δ (NZFO) and Co0.11Fe2.89O4+δ (CFO). The RFI with CFO had a 34% higher inductance and 43% Q improvement compared with the air core RFI at a frequency of 1 GHz. It was confirmed that the complex permeability of the films was correlated with the frequency characteristics of the RFIs with the ferrite thin films. The results suggest that integrating ferrite thin film in RFIs is effective for future mobile device applications.
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