Improvement of effective solid angle using virtual-pivot holder and large EDS detector

Abstract

This paper describes the effective solid angle improvement achieved using a large-area silicon drift detector together with a virtual-pivot double-tilt specimen holder. The virtual-pivot mechanism enables various designs of specimen-retaining and can reduce the shadowing effect. Energy-dispersive X-ray spectra were measured and converted into effective solid angles using different types of specimen holders and specimens. The investigated shadowing-free mechanical system yielded effective solid angles approaching the nominal solid angle of 0.464sr. In addition, we have demonstrated the availability of the plastic (polyetheretherketone) specimen holder for low system noise.